Supplément au Journal de Physique Colloques

CHARACTERIZATION OF SiO₂ FILMS DEPOSITED BY PYROLYSIS OF TETRAETHYLORTHOSILICATE (TEOS)

W.S. WU, S. ROJAS, S. MANZINI, A. MODELLI and D. RE

J. Phys. Colloques, 49 C4 (1988) C4-397-C4-400

DOI: 10.1051/jphyscol:1988483

W.S. WU

S. ROJAS

S. MANZINI

A. MODELLI

D. RE

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