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LIMITATIONS ON n⁺/p⁺ SPACING DUE TO SHADOWING EFFECTS IN A 0.7µm RETROGRADE WELL CMOS PROCESS

M.G. PITT and P.A. van der PLAS

J. Phys. Colloques, 49 C4 (1988) C4-553-C4-556

DOI: 10.1051/jphyscol:19884116

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