Supplément au Journal de Physique Colloques

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ARSENIC SEGREGATION IN POLYSILICON AND AT THE POLY/SINGLE CRYSTALLINE SILICON INTERFACE

H. Oppolzer, W. Eckers and H. Schaber

J. Phys. Colloques, 46 C4 (1985) C4-523-C4-528

DOI: 10.1051/jphyscol:1985458

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