Supplément au Journal de Physique Colloques

ELECTRON SPIN RESONANCE INVESTIGATION OF THE EFFECTS OF THE H₂⁺ IMPLANTATION AND DIFFUSION ONE THE LASER INDUCED DEFECTS IN VIRGIN SILICON

A. Goltzene, B. Meyer, C. Schwab, J.C. Muller and P. Siffert

J. Phys. Colloques, 44 C5 (1983) C5-307-C5-311

DOI: 10.1051/jphyscol:1983546

A. Goltzene

B. Meyer

C. Schwab

J.C. Muller

P. Siffert

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