Supplément au Journal de Physique Colloques

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THE DESIGN AND OPTIMISATION OF A LARGE SCALE VPE REACTOR FOR THE GROWTH OF GaAs BY THE HALIDE PROCESS

I.H. Goodridge

J. Phys. Colloques, 43 C5 (1982) C5-249-C5-258

DOI: 10.1051/jphyscol:1982529

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