Supplément au Journal de Physique Colloques

TEM AND RBS STUDIES OF THE REGROWTH OF ARSENIC IMPLANTED POLYSILICON DUE TO AN OXIDATION DRIVE-IN

M.C. Wilson, P. Ashburn, B. Soerwirdjo, G.R. Booker and P. Ward

J. Phys. Colloques, 43 C1 (1982) C1-253-C1-258

DOI: 10.1051/jphyscol:1982135

M.C. Wilson

P. Ashburn

B. Soerwirdjo

G.R. Booker

P. Ward

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