Supplément au Journal de Physique Colloques

EFFECTS OF ARGON ON THE PROPERTIES OF RF SPUTTERED AMORPHOUS SILICON

Peng Shao-qi, Yu Bing Qai, Zhang Pei Xian and Ye Xian Jing

J. Phys. Colloques, 42 C4 (1981) C4-791-C4-794

DOI: 10.1051/jphyscol:19814173

Peng Shao-qi

Yu Bing Qai

Zhang Pei Xian

Ye Xian Jing

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