HYDROGEN PROFILING IN GAS PHASE DOPED AND ION IMPLANTED AMORPHOUS SILICON FILMS F.J. Demond, G. Müller, H. Damjantschitsch, H. Mannsperger, S. Kalbitzer, P.G. Le Comber and W.E. Spear J. Phys. Colloques, 42 C4 (1981) C4-779-C4-782 DOI: 10.1051/jphyscol:19814170