Supplément au Journal de Physique Colloques

RF POWER AND TEMPERATURE DEPENDENCES IN GD a-Si PRODUCED FROM HEATED SiH₄

S. Hasegawa, Y. Kurata, Y. Imai and S. Narikawa

J. Phys. Colloques, 42 C4 (1981) C4-675-C4-678

DOI: 10.1051/jphyscol:19814149

S. Hasegawa

Y. Kurata

Y. Imai

S. Narikawa

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