Supplément au Journal de Physique Colloques

PROPERTIES OF PURE SILICON AMORPHOUS FILMS PREPARED BY rf-BIAS SPUTTERING

M. Suzuki, T. Maekawa, Y. Kakimoto and T. Bandow

J. Phys. Colloques, 42 C4 (1981) C4-623-C4-626

DOI: 10.1051/jphyscol:19814136

M. Suzuki

T. Maekawa

Y. Kakimoto

T. Bandow

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