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Cited article:

X-RAY SCATTERING MEASUREMENTS OF SILICON OXIDES ON SILICON

R.A. COWLEY, C. LUCAS

J. Phys. Colloques, 50 C7 (1989) C7-145-C7-152

DOI: https://doi.org/10.1051/jphyscol:1989713

PDF (2.212 MB)

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