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Cited article:

A structural study of the thermally oxidized Si(001) wafer by X-ray CTR scattering

Y. Iida, T. Shimura, J. Harada, S. Samata and Y. Matsushita
Surface Science 258 (1-3) 235 (1991)
https://doi.org/10.1016/0039-6028(91)90917-H