Articles citing this article

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The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Anisotropic etching of polymers in SO2/O2plasmas: Hypotheses on surface mechanisms

Michel Pons, Jacques Pelletier and Olivier Joubert
Journal of Applied Physics 75 (9) 4709 (1994)
https://doi.org/10.1063/1.355924

Preparation of copper thin films at ambient temperature by microwave plasma‐enhanced chemical vapor deposition from the copper (II) acetylacetonate‐argon‐hydrogen system

J. Pelletier, R. Pantel, J. C. Oberlin, Y. Pauleau and P. Gouy‐Pailler
Journal of Applied Physics 70 (7) 3862 (1991)
https://doi.org/10.1063/1.349192