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Cited article:

LASER-INDUCED DECOMPOSITION OF METAL CARBONYLS FOR CHEMICAL VAPOR DEPOSITION OF MICROSTRUCTURES

D. TONNEAU, G. AUVERT, Y. PAULEAU

J. Phys. Colloques, 50 C5 (1989) C5-647-C5-656

DOI: https://doi.org/10.1051/jphyscol:1989575

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