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Cited article:

A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films

Moustafa M. Zagho, Hana D. Dawoud, Nasr Bensalah and T. M. Altahtamouni
Emergent Materials 2 (1) 79 (2019)
https://doi.org/10.1007/s42247-018-0018-9