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Cited article:

A TWO DIMENSIONAL MODEL FOR LPCVD REACTORS HYDRODYNAMICS AND MASS TRANSFER

C. VINANTE, P. DUVERNEUIL, J.P. COUDERC

J. Phys. Colloques, 50 C5 (1989) C5-35-C5-43

DOI: https://doi.org/10.1051/jphyscol:1989507

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This article has been cited by the following article(s):

Spatial batch optimal design based on self-learning gaussian process models for LPCVD processes

Pei Sun, Lei Xie and Junghui Chen
Chinese Journal of Chemical Engineering 23 (12) 1958 (2015)
https://doi.org/10.1016/j.cjche.2015.11.013