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Cited article:

RAPID THERMAL PROCESSING OF ARSENIC-IMPLANTED POLYSILICON ON VERY THIN OXIDE

J.Y.-C. SUN, R. ANGELUCCI, C.Y WONG, G. SCILLA, E. LANDI

J. Phys. Colloques, 49 C4 (1988) C4-401-C4-404

DOI: https://doi.org/10.1051/jphyscol:1988484

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