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Cited article:

SILICON MOLECULAR BEAM EPITAXY : STATUS ; DEVICES ; TRENDS

E. KASPER

J. Phys. Colloques, 49 C4 (1988) C4-347-C4-355

DOI: https://doi.org/10.1051/jphyscol:1988473

PDF (4.061 MB)

This article has been cited by the following article(s):

Molecular beam epitaxy of silicon based electronic structures

E. Kasper and J.F. Luy
Microelectronics Journal 22 (3) 5 (1991)
https://doi.org/10.1016/0026-2692(91)90028-L

Operating CMOS after a Si-MBE process: a precondition for future three-dimensional circuits

U. Konig, M. Kuisl, F. Schaffler, G. Fischer and T. Kiss
IEEE Electron Device Letters 11 (5) 218 (1990)
https://doi.org/10.1109/55.55255