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Cited article:

A SELF ALIGNED CONTACT PROCESS WITH IMPROVED SURFACE PLANARIZATION

K.H. KÜSTERS, W. SESSELMANN, H. MELZNER, B. FRIESEL

J. Phys. Colloques, 49 C4 (1988) C4-503-C4-506

DOI: https://doi.org/10.1051/jphyscol:19884104

PDF (1.794 MB)

This article has been cited by the following article(s):

A Polyamide-facilitated Soldering Approach for Mini LED Precise Alignment Leveraging 3D Interfacial Networks

Liangzheng Ji, Jing Zhang, Guoqi Zhang and Pan Liu
Journal of Science: Advanced Materials and Devices 100817 (2024)
https://doi.org/10.1016/j.jsamd.2024.100817