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Cited article:

SOI TECHNOLOGIES : THEIR PAST, PRESENT AND FUTURE

J. HAISMA

J. Phys. Colloques, 49 C4 (1988) C4-3-C4-12

DOI: https://doi.org/10.1051/jphyscol:1988401

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This article has been cited by the following article(s):

Improved geometry of double-sided polished parallel wafers prepared for direct wafer bonding

Jan Haisma, Frank J. H. M. van der Kruis, Bert A. C. M. Spierings, et al.
Applied Optics 33 (34) 7945 (1994)
https://doi.org/10.1364/AO.33.007945