Articles citing this article

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Cited article:

Boron liquid metal alloy ion sources for special focused ion beam applications

Lothar Bischoff, Nico Klingner, Paul Mazarov, Wolfgang Pilz and Fabian Meyer
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 38 (4) (2020)
https://doi.org/10.1116/6.0000073

Liquid metal alloy ion sources—An alternative for focussed ion beam technology

Lothar Bischoff, Paul Mazarov, Lars Bruchhaus and Jacques Gierak
Applied Physics Reviews 3 (2) 021101 (2016)
https://doi.org/10.1063/1.4947095