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Cited article:

Selective Heating of Transition Metal Usings Hydrogen Plasma and Its Application to Formation of Nickel Silicide Electrodes for Silicon Ultralarge-Scale Integration Devices

Tetsuji Arai, Hiroki Nakaie, Kazuki Kamimura, et al.
Journal of Materials Science and Chemical Engineering 04 (01) 29 (2016)
https://doi.org/10.4236/msce.2016.41006