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Cited article:

ETUDE PAR ELLIPSOMETRIE EN TEMPS REEL D'ANODISATIONS PLASMA DE SILICIUM MONOCRISTALLIN

A. Vareille, A. Straboni, B. Vuillermoz, Ph. Ged

J. Phys. Colloques, 44 C10 (1983) C10-257-C10-260

DOI: https://doi.org/10.1051/jphyscol:19831054

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