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Cited article:

ON THE ACCURACY OF ELLIPSOMETRIC THICKNESS DETERMINATIONS FOR VERY THIN FILMS

D. Chandler-Horowitz, G.A. Candela

J. Phys. Colloques, 44 C10 (1983) C10-23-C10-26

DOI: https://doi.org/10.1051/jphyscol:19831003

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