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Cited article:

PLASMA DIAGNOSTIC DURING THE GROWTH OF a-Si : H

T. Hamasaki, M. Hirose, Y. Osaka

J. Phys. Colloques, 42 C4 (1981) C4-807-C4-810

DOI: https://doi.org/10.1051/jphyscol:19814177

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This article has been cited by the following article(s):

Plasma Deposition of Amorphous Silicon-Based Materials

Guy Turban, Bernard Drévillon, Dimitri S. Mataras and Dimitri E. Rapakoulias
Plasma Deposition of Amorphous Silicon-Based Materials 63 (1995)
https://doi.org/10.1016/B978-012137940-7/50003-6