The Citing articles tool gives a list of articles citing the current article. The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).
En Zhou, Hongchang Jin, Haifeng Lv, Yuansen Xie, Yuhao Lu, Ying-Rui Lu, Ting-Shan Chan, Chao Wang, Wensheng Yan, Jing Zhang, Hengxing Ji, Xiaojun Wu and Xiangfeng Duan Journal of the American Chemical Society 146(30) 20700 (2024) https://doi.org/10.1021/jacs.4c03680
Fundamental reliability of 1.5-nm-thick silicon oxide gate films grown at 150°C by modified reactive ion beam deposition
Hiroshi Yamada Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 26(1) 36 (2008) https://doi.org/10.1116/1.2812430
1.5-nm-thick silicon oxide gate films grown at 150°C using modified reactive ion beam deposition with pyrolytic-gas passivation
Hiroshi Yamada Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 25(2) 340 (2007) https://doi.org/10.1116/1.2699503
Excess Si and passivating N and F atoms near the pyrolytic-gas-passivated ultrathin silicon oxide film/Si(100) interface
Inhibition of excess interface Si atom generation in 700 °C-grown pyrolytic-gas passivated ultrathin silicon oxide films
Hiroshi Yamada Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 23(4) 599 (2005) https://doi.org/10.1116/1.1924580
Compositional and structural studies of amorphous silicon-nitrogen alloys deposited at room temperature using a sputtering-type electron cyclotron resonance microwave plasma