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Cited article:

The dependence of the dark conductivity of hydrogenated amorphous silicon films on the hydride content

F. Gaspari, S.K. O'Leary, S. Zukotynski and J.M. Perz
Journal of Non-Crystalline Solids 155 (2) 149 (1993)
https://doi.org/10.1016/0022-3093(93)91319-X

Reactive sputtering of amorphous silicon in Ne, Ar, and Kr

R. C. Ross and R. Messier
Journal of Applied Physics 54 (10) 5744 (1983)
https://doi.org/10.1063/1.331797