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STRUCTURE OF THE SILICIDE/Si, SiO₂/Si INTERFACE ANALYSED USING HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY

C. D'ANTERROCHES, P. PERRET and J.R. BROSSELIN

J. Phys. Colloques, 51 C1 (1990) C1-729-C1-736

DOI: 10.1051/jphyscol:19901116

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