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MOLECULAR ENGINEERING IN SEMICONDUCTOR TECHNOLOGY : BOROSILICATEGLASS BY DECOMPOSITION OF A MONOMOLECULAR PRECURSOR

H. TREICHEL, O. SPINDLER and Th. KRUCK

J. Phys. Colloques, 50 C5 (1989) C5-747-C5-756

DOI: 10.1051/jphyscol:1989590

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