THIN FILM OF CERAMIC OXIDES BY MODIFIED CVD J.L. DESCHANVRES, F. CELLIER, G. DELABOUGLISE, M. LABEAU, M. LANGLET et J.C. JOUBERT J. Phys. Colloques, 50 C5 (1989) C5-695-C5-705 DOI: 10.1051/jphyscol:1989582