Supplément au Journal de Physique Colloques

MODELING OF COLD WALL CHEMICAL VAPOR DEPOSITION REACTORS (FOR SEMICONDUCTOR FABRICATION)

M. PONS, R. KLEIN, C. ARENA and S. MARIAUX

J. Phys. Colloques, 50 C5 (1989) C5-57-C5-65

DOI: 10.1051/jphyscol:1989510

M. PONS

R. KLEIN

C. ARENA

S. MARIAUX

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