Supplément au Journal de Physique Colloques

CONVECTION AND CHEMISTRY EFFECTS IN CVD - A 3-D ANALYSIS FOR SILICON DEPOSITION

S.A. GOKOGLU, M. KUCZMARSKI, P. TSUI and A. CHAIT

J. Phys. Colloques, 50 C5 (1989) C5-17-C5-34

DOI: 10.1051/jphyscol:1989506

S.A. GOKOGLU

M. KUCZMARSKI

P. TSUI

A. CHAIT

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