Supplément au Journal de Physique Colloques

CMOS TECHNOLOGY USING PLASMA NITRIDED OXIDE AS A GATE DIELECTRIC

A. STRABONI, M. BERENGUER, B. VUILLERMOZ, P. DEBENEST, A. VERNA and P. DARS

J. Phys. Colloques, 49 C4 (1988) C4-421-C4-424

DOI: 10.1051/jphyscol:1988489

A. STRABONI

M. BERENGUER

B. VUILLERMOZ

P. DEBENEST

A. VERNA

P. DARS

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