Supplément au Journal de Physique Colloques

A SELF ALIGNED CONTACT PROCESS WITH IMPROVED SURFACE PLANARIZATION

K.H. KÜSTERS, W. SESSELMANN, H. MELZNER and B. FRIESEL

J. Phys. Colloques, 49 C4 (1988) C4-503-C4-506

DOI: 10.1051/jphyscol:19884104

K.H. KÜSTERS

W. SESSELMANN

H. MELZNER

B. FRIESEL

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