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TECHNIQUES FOR PRODUCING DEFECT-FREE SOI BY DUAL ELECTRON BEAM HEATING OF DEPOSITED POLYSILICON

J.R. Davis, R.A. McMahon and H. Ahmed

J. Phys. Colloques, 44 C5 (1983) C5-337-C5-341

DOI: 10.1051/jphyscol:1983550

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