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SILICON MODULATION DOPING STRUCTURES USING MULTI-STEP MOLECULAR BEAM EPITAXY AND ION IMPLANTATION

T. de Jong, W.A.S. Douma and F.W. Saris

J. Phys. Colloques, 43 C5 (1982) C5-173

DOI: 10.1051/jphyscol:1982520

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