STRUCTURE OF THE SILICIDE/Si, SiO2/Si INTERFACE ANALYSED USING HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY C. D'ANTERROCHES, P. PERRET et J. R. BROSSELINJ. Phys. Colloques, 51 C1 (1990) C1-729-C1-736DOI: https://doi.org/10.1051/jphyscol:19901116
