MOLECULAR ENGINEERING IN SEMICONDUCTOR TECHNOLOGY : BOROSILICATEGLASS BY DECOMPOSITION OF A MONOMOLECULAR PRECURSOR H. TREICHEL, O. SPINDLER et Th. KRUCKJ. Phys. Colloques, 50 C5 (1989) C5-747-C5-756DOI: https://doi.org/10.1051/jphyscol:1989590
