THIN FILM OF CERAMIC OXIDES BY MODIFIED CVD J. L. DESCHANVRES, F. CELLIER, G. DELABOUGLISE, M. LABEAU, M. LANGLET et J. C. JOUBERTJ. Phys. Colloques, 50 C5 (1989) C5-695-C5-705DOI: https://doi.org/10.1051/jphyscol:1989582