AMORPHOUS SILICON NITRIDE THIN FILMS PERFORMED IN TWO PECVD EXPERIMENTAL DEVICES J. L. JAUBERTEAU, M. I. BARATON, MM GERBIER, P. QUINTARD, J. DESMAISON, J. AUBRETON et A. CATHERINOTJ. Phys. Colloques, 50 C5 (1989) C5-657-C5-664DOI: https://doi.org/10.1051/jphyscol:1989576
