LASER-INDUCED DECOMPOSITION OF METAL CARBONYLS FOR CHEMICAL VAPOR DEPOSITION OF MICROSTRUCTURES D. TONNEAU, G. AUVERT et Y. PAULEAUJ. Phys. Colloques, 50 C5 (1989) C5-647-C5-656DOI: https://doi.org/10.1051/jphyscol:1989575
