THE PREPARATION AND PROPERTIES OF PECVD-MADE SnO2 THIN FILMS Y. P. CHEN, Z. Q. ZHENG, S. Y. LI et H. L. MAJ. Phys. Colloques, 50 C5 (1989) C5-605-C5-611DOI: https://doi.org/10.1051/jphyscol:1989571
