AN INFLUENCE OF DOPING ON THE KINETICS OF BPSG DEPOSITION PROCESS AND THE PROPERTIES OF THE DEPOSITED LAYER P. B. GRABIEC et S. M. PIETRUSZKOJ. Phys. Colloques, 50 C5 (1989) C5-585-C5-593DOI: https://doi.org/10.1051/jphyscol:1989569
