EXPERIMENTAL AND THEORETICAL DEPOSITION PROFILES FOR STATIC AND DYNAMIC PCVD WITH WF6/H2 AND/OR ORGANOMETALLIC STARTING COMPOUNDS G. GÄRTNER, P. JANIEL et F. WELINGJ. Phys. Colloques, 50 C5 (1989) C5-73-C5-82DOI: https://doi.org/10.1051/jphyscol:1989512
