CHARACTERIZATION OF SiO2 FILMS DEPOSITED BY PYROLYSIS OF TETRAETHYLORTHOSILICATE (TEOS) W. S. WU, S. ROJAS, S. MANZINI, A. MODELLI et D. REJ. Phys. Colloques, 49 C4 (1988) C4-397-C4-400DOI: https://doi.org/10.1051/jphyscol:1988483
