STATISTICAL ANALYSIS OF IMPLANT ANGLES EFFECTS ON ASYMMETRICAL NMOSFETs CHARACTERISTICS AND RELIABILITY P. DARS, T. TERNISIEN d'OUVILLE, H. MINGAM et G. MERCKELJ. Phys. Colloques, 49 C4 (1988) C4-315-C4-317DOI: https://doi.org/10.1051/jphyscol:1988466
