DEGRADATION OF THE POLY-Si/SILICIDE STRUCTURE IN ADVANCED MOS-TECHNOLOGIES P. LIPPENS, K. MAEX, L. VAN den HOVE, R. DE KEERSMAECKER, V. PROBST, W. KOPPENOL et W. van der WEGJ. Phys. Colloques, 49 C4 (1988) C4-191-C4-194DOI: https://doi.org/10.1051/jphyscol:1988439
