SHALLOW DOPING PROFILES FOR HIGH-SPEED BIPOLAR TRANSISTORS K. EHINGER, H. KABZA, J. WENG, M. MIURA-MATTAUSCH, I. MAIER, H. SCHABER et J. BIEGERJ. Phys. Colloques, 49 C4 (1988) C4-109-C4-112DOI: https://doi.org/10.1051/jphyscol:1988423
