A TRENCH ISOLATED HIGH SPEED BIPOLAR PROCESS FOR A 10K GATE, 950MHz, VLSI CIRCUIT C. MALLARDEAU, M. ROCHE, M. DEPEY, F. DELL'OVA, D. THOMAS, D. CELI, P. HUNT et A. HEFNERJ. Phys. Colloques, 49 C4 (1988) C4-105-C4-108DOI: https://doi.org/10.1051/jphyscol:1988422