LIMITATIONS ON n+/p+ SPACING DUE TO SHADOWING EFFECTS IN A 0.7µm RETROGRADE WELL CMOS PROCESS M. G. PITT et P. A. van der PLASJ. Phys. Colloques, 49 C4 (1988) C4-553-C4-556DOI: https://doi.org/10.1051/jphyscol:19884116
